Wei Wei Qin
Indiana
Research Article
Nano Size Related Piezoelectric Efficiency in a Large ZnO Thin Film,
Potential for Self-Powered Medical Device Application
Author(s): YuTong Li, Zhiqang Gao, Wei Wei Qin, Qiu Jun Wen, Ma Xian Jun, Wei Du, Xiaoqiang Chen, Hu Xue Feng and Wei Zhang
YuTong Li, Zhiqang Gao, Wei Wei Qin, Qiu Jun Wen, Ma Xian Jun, Wei Du, Xiaoqiang Chen, Hu Xue Feng and Wei Zhang
Large-area piezoelectric ZnO films with different gran size has been synthesized by sol-gel technique using different annealing temperatures from 550 to 700°C. The piezoelectric efficiency (PE) of those deposited films is characterized by Piezoelectric Force Microscopy (PFM). All synthesized films exhibit a crystal structure. The width of the rock curve of [0002] characterized by x-ray diffraction decreases with the annealing temperature, suggesting a better c-axis orientated ZnO film formed at higher annealing temperature. The grain size of the grown films are found to continuously increase from 20 to 60 nm when the annealing temperatures increase from 550 to 700°C. The piezoelectric efficiency (PE, d33) of the films exhibit strong grain size dependence, i.e., the PE initially increase with the annealing temperature and then decreasing with a further annealing temperature inc.. View More»
DOI:
10.4172/2161-1009.1000243